JPS6331392Y2 - - Google Patents
Info
- Publication number
- JPS6331392Y2 JPS6331392Y2 JP18546483U JP18546483U JPS6331392Y2 JP S6331392 Y2 JPS6331392 Y2 JP S6331392Y2 JP 18546483 U JP18546483 U JP 18546483U JP 18546483 U JP18546483 U JP 18546483U JP S6331392 Y2 JPS6331392 Y2 JP S6331392Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- loader
- cleaning
- loaders
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 claims description 27
- 238000012360 testing method Methods 0.000 claims description 12
- 230000007246 mechanism Effects 0.000 claims description 8
- 230000032258 transport Effects 0.000 claims description 8
- 230000007723 transport mechanism Effects 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 36
- 238000010586 diagram Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18546483U JPS6092835U (ja) | 1983-11-30 | 1983-11-30 | クリ−ニングウエハの保持機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18546483U JPS6092835U (ja) | 1983-11-30 | 1983-11-30 | クリ−ニングウエハの保持機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6092835U JPS6092835U (ja) | 1985-06-25 |
| JPS6331392Y2 true JPS6331392Y2 (en]) | 1988-08-22 |
Family
ID=30400852
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18546483U Granted JPS6092835U (ja) | 1983-11-30 | 1983-11-30 | クリ−ニングウエハの保持機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6092835U (en]) |
-
1983
- 1983-11-30 JP JP18546483U patent/JPS6092835U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6092835U (ja) | 1985-06-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6331392Y2 (en]) | ||
| JPS635211Y2 (en]) | ||
| JPH03289152A (ja) | プローブ装置 | |
| JPH09222461A (ja) | テスティングマシン | |
| JPH05136219A (ja) | 検査装置 | |
| JPS62262438A (ja) | ウエハ処理装置 | |
| JPH1019928A (ja) | クリーニング部材及びそれを用いたクリーニング方法 | |
| JP2767291B2 (ja) | 検査装置 | |
| JPH0222837A (ja) | ウエハプロービング装置 | |
| JP2828989B2 (ja) | 半導体ウェハプローバ | |
| JPS63250573A (ja) | 部品検査装置 | |
| JPS6239822B2 (en]) | ||
| JPH03220742A (ja) | プロービングマシン | |
| JPS58121638A (ja) | ウエ−ハプロ−バ用検針のチエツク方法 | |
| JPS61125038A (ja) | 半導体ウエハ測定載置台 | |
| JPH02210276A (ja) | プローバ及びプロービング方法 | |
| JPH067568B2 (ja) | プローバの制御方法 | |
| JPS61206238A (ja) | 自動半導体ウエハプロ−バ | |
| JPH02151048A (ja) | 半導体集積回路 | |
| JPS6118337B2 (en]) | ||
| JPH043107B2 (en]) | ||
| JPH02265255A (ja) | プローブ装置システム | |
| KR20010097278A (ko) | 반도체 웨이퍼 검사 장치 | |
| JPH0438847A (ja) | ウエハプローバ | |
| JPS62280662A (ja) | 半導体装置の測定装置の測定精度管理方法 |